JPH0125903B2 - - Google Patents

Info

Publication number
JPH0125903B2
JPH0125903B2 JP20018185A JP20018185A JPH0125903B2 JP H0125903 B2 JPH0125903 B2 JP H0125903B2 JP 20018185 A JP20018185 A JP 20018185A JP 20018185 A JP20018185 A JP 20018185A JP H0125903 B2 JPH0125903 B2 JP H0125903B2
Authority
JP
Japan
Prior art keywords
relief valve
valve
cryopump
piston
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20018185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6260988A (ja
Inventor
Shinji Oosako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP20018185A priority Critical patent/JPS6260988A/ja
Publication of JPS6260988A publication Critical patent/JPS6260988A/ja
Publication of JPH0125903B2 publication Critical patent/JPH0125903B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP20018185A 1985-09-10 1985-09-10 リリ−フ弁装置 Granted JPS6260988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20018185A JPS6260988A (ja) 1985-09-10 1985-09-10 リリ−フ弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20018185A JPS6260988A (ja) 1985-09-10 1985-09-10 リリ−フ弁装置

Publications (2)

Publication Number Publication Date
JPS6260988A JPS6260988A (ja) 1987-03-17
JPH0125903B2 true JPH0125903B2 (en]) 1989-05-19

Family

ID=16420140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20018185A Granted JPS6260988A (ja) 1985-09-10 1985-09-10 リリ−フ弁装置

Country Status (1)

Country Link
JP (1) JPS6260988A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6200197B2 (ja) * 2013-04-23 2017-09-20 株式会社モリタホールディングス 高速開放機構
CN108252893B (zh) * 2018-01-25 2019-07-23 乐清市乐翔电气有限公司 一种无气耗气体增压系统

Also Published As

Publication number Publication date
JPS6260988A (ja) 1987-03-17

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term